发明名称 DEPOSITION FILM FORMING METHOD AND METHOD OF CHANGING OIL IN VACUUM PUMP
摘要 PROBLEM TO BE SOLVED: To prolong the service life of a vacuum pump and to improve the durability thereof by suppressing the damages given to the vacuum pump. SOLUTION: The oil change time of a rotary pump 1117-2 being the vacuum pump, is judged by at least one of the kinematic viscosity, the total acid value and the contamination degree of the oil in the rotary pump 1117-2 and the oil is changed based on the result. For example, when one of respective conditions of >=150 mm<2> /S kinematic viscosity of the oil in the rotary pump 1117-2, >=3.5 mg/KOH total acid value and >=70 mg/100 cm<3> contamination degree is satisfied, the oil is changed.
申请公布号 JP2002317273(A) 申请公布日期 2002.10.31
申请号 JP20010118154 申请日期 2001.04.17
申请人 CANON INC 发明人 SEKI YOSHIO;MATSUOKA HIDEAKI;KARAKI TETSUYA;KATAGIRI HIROYUKI;HITSUISHI MITSUHARU
分类号 B01J3/00;B01J19/08;C23C16/44;C23C16/455;C23C16/56;H01L21/205;(IPC1-7):C23C16/56 主分类号 B01J3/00
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