CHARGED PARTICLE BEAM ALIGNER, MANUFACTURING METHOD OF DEVICE, AND CHARGED PARTICLE BEAM APPLICATION DEVICE

摘要

PURPOSE: To provide a high-precision multiple charged particle beam aligner without raising the performance of a demagnification electronic optical system. CONSTITUTION: There are provided a charged particle beam source ES which radiates a charged particle beam, an aperture array AA in which a plurality of openings are arrayed to divide the charged particle beam from the charged particle source ES into a plurality of charged particle beams, a lens array A in which a plurality of electron lenses are arrayed to form a plurality of intermediate images of the charged particle beam source ES on an almost identical plane by a plurality of charged particle beam from the aperture array AA, a blanker array BA which is on a plane where a plurality of intermediate images are formed ad comprises a plurality of blankers, and a demagnification electron optical system which projects a demagnified image of the charged particle beam source ES on a substrate.