| 发明名称 |
MEMS micro-relay with coupled electrostatic and electromagnetic actuation |
| 摘要 |
A micorelectromechanical relay and a method of fabricating the same that combines electrostatic actuation with electromagnetic actuation. The relay has very low contact resistance when the relay is in its ON state and enhanced contact-to-contact isolation when the relay is in its OFF state.
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| 申请公布号 |
US2002160549(A1) |
申请公布日期 |
2002.10.31 |
| 申请号 |
US20010843532 |
申请日期 |
2001.04.26 |
| 申请人 |
SUBRAMANIAN ARUNKUMAR;BROMLEY SUSAN;NELSON BRADLEY J.;VOLLMERS KARL |
发明人 |
SUBRAMANIAN ARUNKUMAR;BROMLEY SUSAN;NELSON BRADLEY J.;VOLLMERS KARL |
| 分类号 |
B81B3/00;H01H50/00;H01H53/06;(IPC1-7):H01L21/00 |
主分类号 |
B81B3/00 |
| 代理机构 |
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