| 摘要 |
A vacuum ultraviolet laser wavelength measuring apparatus capable of accurately measuring wavelength characteristics of a laser beam. The wavelength measuring apparatus (3), having spectral means for generating an optical pattern corresponding to wavelength characteristics of an incident laser beam and measuring wavelength characteristics of a laser beam in a vacuum ultraviolet region oscillating from a vacuum ultraviolet laser on the basis of the optical pattern, comprises a fluorescent screen (15) for generating a fluorescent pattern (14) having an intensity distribution corresponding to an intensity distribution of the incident optical pattern, a pattern detector (17) for measuring the intensity distribution of the fluorescent pattern, and an arithmetic unit (28) for calculating the wavelength characteristics of the laser beam on the basis of the measured intensity distribution.
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