METHOD OF PRODUCING SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE

摘要

The carrying of wafers in the bay of a clean room (a group of devices) is effected by a RGV (Rail Guided Vehicle) linearly moving at high speed on a carrier rail (3) laid on the floor of the clean room. The carrier area where the RGV travels is separated from a manual working area by a partition (4), so that no one can enter the carrier area during the operating time of the line.