ELECTRODE MATERIAL HAVING IMPROVED HYDROGEN DEGRADATION RESISTANCE, AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an electrode material having improved hydrogen degradation resistance. SOLUTION: The electrode used for a ferroelectric device comprises a lower electrode, a ferroelectric layer and an upper electrode; and the upper electrode is formed on the ferroelectric layer, formed in combination with a metal which contains a first metal selected from the group, consisting of platinum and iridium and a second metal selected from the group consisting of aluminum and titanium, and functions as a protective layer.