WAFER TRANSFER APPARATUS, VAPOR PHASE GROWTH SYSTEM, AND METHOD OF TRANSFERRING WAFER

摘要

PROBLEM TO BE SOLVED: To provide a wafer transfer apparatus that can accurately recognize the central position of a wafer, even if a sensor detects the outer periphery of the orientation flat or notch of the wafer, and to provide a vapor phase growth system and a method of transferring the wafer. SOLUTION: The wafer tranfer apparatus is provided with a detector 7 which detects four or more points on the outer periphery of the wafer W and an arithmetic section which finds four or more candidates for the center position of the wafer W through calculation based on the detected results of the detector 7. The device is also provided with a recognition section which recognizes the true central position of the wafer W, by discriminating the position out of the candidates found by means of an arithmetic section and a transfer mechanism 4 which transports the wafer W to a prescribed position based on the true center position of the wafer W recognized by means of the recognition section.