PATTERNING OF NANOCRYSTALLINE DIAMOND FILMS FOR DIAMOND MICROSTRUCTURES USEFUL IN MEMS AND OTHER DEVICES
摘要
MEMS structure and a method of fabricating them from ultrananocrystalline diamond films having average grain sizes of less than about 10 nm and feature resolution of less than about one micron. The MEMS structures are made by contacting carbon dimer species with an oxide substrate forming a carbide layer on the surface onto which ultrananocrystalline diamond having average grain sizes of less than about 10 nm is deposited. Thereafter, microfabrication process are used to form a structure of predetermined shape having a feature resolution of less than about one micron.
申请公布号
WO0157295(A9)
申请公布日期
2002.10.31
申请号
WO2001US02755
申请日期
2001.01.26
申请人
THE UNIVERSITY OF CHICAGO;GRUEN, DIETER, M.;BUSMANN, HANS-GERD;MEYER, EVA-MARIA;AUCIELLO, ORLANDO;KRAUSS, JULIE, R.
发明人
GRUEN, DIETER, M.;BUSMANN, HANS-GERD;MEYER, EVA-MARIA;AUCIELLO, ORLANDO;KRAUSS, ALAN, R. DI