| 摘要 |
PURPOSE: A piezoelectric actuator micro-mirror and a fabrication method thereof are provided, which has no initial deformation due to residual stress and has a big actuating angle and a free actuating direction. CONSTITUTION: According to the micro-mirror, a substrate has a cavity on its center, and an insulator is formed on the substrate, and a mirror is located in the cavity region. A supporting body is formed on a bottom of the mirror and supports the mirror. Cantilevers are arranged in parallel in two as to both sides of the supporting body by being projected from the insulator, and are connected to both sides of the supporting body respectively. A piezoelectric actuator is formed on each cantilever, and actuates the supporting body according to a voltage applied from the external. And a hinge connects the cantilever and the supporting body.
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