| 发明名称 |
Carrier shape measurement device |
| 摘要 |
A carrier shape measurement device includes : a stage which supports a carrier which is to be a subject of measurement; and a measurement section which measures a shape of the carrier, and the stage comprises kinematic coupling pins to support the carrier by a kinematic coupling. <IMAGE> |
| 申请公布号 |
EP1158571(A3) |
申请公布日期 |
2002.10.30 |
| 申请号 |
EP20010304623 |
申请日期 |
2001.05.24 |
| 申请人 |
NIKON CORPORATION;SEMICONDUCTOR LEADING EDGE TECHNOLOGIES, INC. |
发明人 |
SHIMIZU, FUSAO;FUJI, ATSUHIRO |
| 分类号 |
G01B11/00;G01B11/24;H01L21/673 |
主分类号 |
G01B11/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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