APPARATUS FOR WATER CIRCULATION IN SEMICONDUCTOR EQUIPMENT

摘要

PURPOSE: An apparatus for water circulation in semiconductor equipment is provided to monitor a flow rate of a water line and generate an alarm signal according to an abnormal state of the flow rate. CONSTITUTION: A storage tank(102) is used for storing water which is circulated through a circulation tube(106) in order to maintain temperature of chemicals. The storage tank(102) is used for maintaining constantly temperature of the stored water. A contact portion(105) is connected with the storage tank(102) through the circulation tube(106). The contact portion(105) is partially contacted with a chemical line(200) in order to maintain the temperature of the chemical line(200). A circulation portion(103) supplies the stored water to the contact portion(105) through the circulation tube(106) according to a circulation command of a control portion(101). A flow rate detection portion(104) is installed at the circulation tube(106) in order to detect a flow rate of the circulated water.