| 摘要 |
PURPOSE: A method for fabricating a piezoelectric actuator micro-mirror is provided, which enables a low voltage actuation and can be controlled easily, and can obtain a flat surface. CONSTITUTION: According to the method, a nitride layer(12) is formed on a top and a bottom surface of a substrate(11) respectively, and then an oxide(13) and a bottom electrode layer and a piezoelectric layer and a top electrode layer are formed on the nitride layer in sequence. A fixed area on the top electrode layer and the piezoelectric layer are etched by a dry etching, and a fixed area on the bottom electrode layer is etched secondary by a dry etching. The nitride layer is revealed by a wet etching of the oxide layer, and then a mirror is formed on the revealed nitride layer. A membrane is formed by etching the nitride layer and the substrate, and then a cantilever is formed by etching the oxide and the nitride layer.
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