| 发明名称 |
Semiconductor device provided with fuse and method of disconnecting fuse |
| 摘要 |
<p>A high-strength protective member (14c) made of tungsten is disposed under a disconnecting point of a fuse (15). This protective member (14c) is formed simultaneously with formation of a via contact portion (14a, 14b) which connects the fuse (15) with wiring (13a, 13b), for example.</p> |
| 申请公布号 |
EP1253641(A2) |
申请公布日期 |
2002.10.30 |
| 申请号 |
EP20020252413 |
申请日期 |
2002.04.03 |
| 申请人 |
FUJITSU LIMITED |
发明人 |
TATEMATSU, TSUTOMU;TOGASHI, KENGI;NAKADA, MASAYUKI;SAWADA, TOYOJI;SUKEGAWA, KAZUO;YAMADA, TOMOYUKI;ARISAKA, YOSHIKAZU |
| 分类号 |
H01L21/82;H01L21/8242;H01L23/525;H01L27/10;H01L27/108;(IPC1-7):H01L23/525 |
主分类号 |
H01L21/82 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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