发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR
摘要 PURPOSE: To provide a semiconductor device that can be manufactured, without having to add special manufacturing process by forming a MIM capacitor having proper characteristics on a semiconductor substrate, and to provide a method of manufacturing the device. CONSTITUTION: The MIM capacitor 11, (composed of a lower electrode film 8a, a capacitor insulating film 9a, and an upper electrode film 10a) provided on an lower interlayer insulating film 3, is formed to the same height as that of a plug 14a which connects lower-layer wiring 6 and upper-layer wiring 14c to each other, so that an upper electrode connecting hole is not required.
申请公布号 KR20020082145(A) 申请公布日期 2002.10.30
申请号 KR20020021913 申请日期 2002.04.22
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 KAJITA AKIHIRO;YAMADA MASAKI
分类号 H01L21/02;H01L21/768;H01L21/822;H01L27/04;(IPC1-7):H01L27/04 主分类号 H01L21/02
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