| 摘要 |
PURPOSE: An organic layer vacuum evaporation equipment is provided to efficiently deposit an evaporated or sublimed organic layer onto a structure which forms part of an organic light-emitting device. CONSTITUTION: An apparatus comprises a housing(140H) defining a chamber and a pump connected to the chamber for reducing the pressure therein, a source for receiving organic material to be evaporated or sublimed and units connected to the source for adjusting the temperature thereof to control the rate at which the organic material is evaporated or sublimed, a unit for positioning the structure so that such structure is located spaced from the source in a deposition zone, a moving member moving through a plurality of positions along a path of motion, the moving member in the first position having a portion thereof positioned in the deposition zone for receiving organic material from the source at the same time such organic material is deposited onto the structure, the first optical sensing unit in the second position disposed relative to the moving member outside the deposition zone for sensing a thickness of the organic material deposited on the portion of the moving member, an electrical unit connected to the first optical sensing unit and responsive to the thickness of the organic material sensed by the first optical sensing unit, a unit for adjusting the temperature control unit to control the rate of deposition and the thickness of the organic layer formed on the structure, and a cleaning unit disposed in a third position along the path of motion of the member outside the deposition zone beyond the first optical sensing unit for removing in whole or in part organic material deposited on the portion of the member so that such portion can be reused in the deposition zone.
|
