发明名称 Using silicate layers for composite semiconductor structures
摘要 A composite semiconductor including silicon and compound semiconductor, and having a silicate layer for promoting layer-by-layer monocrystalline growth. Silicon may be introduced to react with the monocrystalline oxide layer to form the silicate layer. During the fabrication process, the thickness of the amorphous oxide layer may be increased by suitable methods, such as annealing or oxygen diffusion.
申请公布号 US6472276(B1) 申请公布日期 2002.10.29
申请号 US20010908902 申请日期 2001.07.20
申请人 MOTOROLA, INC. 发明人 HILT LYNDEE L.;DROOPAD RAVINDRANATH
分类号 C30B25/18;H01L21/20;H01L21/316;H01L33/00;H01S5/02;H01S5/026;(IPC1-7):H01L21/336 主分类号 C30B25/18
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