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发明名称
SEMICONDUCTOR-MANUFACTURING APPARATUS
摘要
申请公布号
EP1235257(A4)
申请公布日期
2002.10.29
申请号
EP20000969956
申请日期
2000.10.20
申请人
APPLIED MATERIALS, INC.
发明人
MAEDA, YUJI;NAKANISHI, KOJI;TOKAI, NOBUO;KAWAI, ICHIRO
分类号
H01L21/205;C23C16/458;C23C16/46;C23C16/52;H01L21/00;H01L21/26;H01L21/68;H01L21/687;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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