Dielectric layer with treated top surface forming an etch stop layer and method of making the same

摘要

A metal interconnect arrangement provides a dielectric layer that has its upper surface treated to provide an etch stop etch stop layer. The upper surface is subjected to a plasma etch that treats, such as by carbonization, the dielectric material in a manner that alters the etch characteristics of the dielectric material. After a second dielectric layer is formed over the treated surface of the first dielectric layer, an etching may be performed through the second dielectric layer that stops on the treated surface of the first dielectric layer in a damascene interconnect process.