发明名称 Flexural joint
摘要 A flexural joint, in particular a flexural thrust joint suitable for precision stages and application requiring vacuum is disclosed herein. A two degree of freedom joint comprises: two joint elements, each with a load bearing surface; two flexures attached between the elements, such that the flexures are under tension when the joint is subject to a compressive load. The flexures are long and thin, such that they can twist and bend, giving the joint two degrees of freedom. A three degree of freedom joint comprises: a first joint element with a load bearing surface; a second joint element with a second load bearing surface; a third joint element; two first flexures attached between the second and third elements; two second flexures attached between the third and first elements, such that both the first and second flexures are under tension when the joint is subject to a compressive load. Either one or both pairs of flexures are long and thin, such that they can twist and bend, giving the joint three degrees of freedom.
申请公布号 US6471435(B1) 申请公布日期 2002.10.29
申请号 US20000543283 申请日期 2000.04.05
申请人 MULTIBEAM SYSTEMS, INC.;MOTOROLA, INC. 发明人 LEE MARTIN E.
分类号 G03F7/20;H01J37/20;H01L21/68;(IPC1-7):F16F1/18 主分类号 G03F7/20
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