| 摘要 |
A heat-sensitive flow rate sensor that is high in productivity, superior in accuracy of flow rate measurement and sensitivity. A bottom face of a concave accommodating portion 18 of an supporting member 16 is provided with an adhesion face 24 for fastening a flow rate-detecting element 14 thereon with an adhesive 15, installation faces 25a, 25b for holding the flow rate-detecting element 14 thereon, and a protruding face 26 for blocking in a raised manner the whole area of a cavity 13 on the underside of the flow rate-detecting element 14. As a result of employing this construction, even when increasing an intake fluid to a large amount of flow, the protruding face 26 blocks the vicinity of the cavity 13. Therefore, the fluid to be measured hardly flows into the gap between the underside of the flow rate-detecting element 14 and the supporting member 16. Consequently, accuracy in flow rate measurement is improved. Furthermore, the protruding face 26 is formed slightly larger than the area of the cavity 13 in the flow rate-detecting element 14, thereby preventing an underflow. As a result, assembling the flow rate-detecting element 14 becomes easier, which is suitable for large-scale production.
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