发明名称 |
Manufacturing process automation system using a file server and its control method |
摘要 |
In an automation system, a plurality of machines are connected to a file server via a network and the job result data produced by the machines, are shared by the file server. The job result data processed from a machine (for example, a tester) are stored in the file server. Another machine (for example, a repairer) can execute a job by using the above job result data.
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申请公布号 |
US6473664(B1) |
申请公布日期 |
2002.10.29 |
申请号 |
US19990299739 |
申请日期 |
1999.04.27 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
LEE SANG-HYUN;BYUN SUNG-JUN |
分类号 |
H01L21/02;G02F1/13;G05B15/00;G05B19/418;G05B24/02;H01L21/00;(IPC1-7):G06F19/00 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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