发明名称 Manufacturing process automation system using a file server and its control method
摘要 In an automation system, a plurality of machines are connected to a file server via a network and the job result data produced by the machines, are shared by the file server. The job result data processed from a machine (for example, a tester) are stored in the file server. Another machine (for example, a repairer) can execute a job by using the above job result data.
申请公布号 US6473664(B1) 申请公布日期 2002.10.29
申请号 US19990299739 申请日期 1999.04.27
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 LEE SANG-HYUN;BYUN SUNG-JUN
分类号 H01L21/02;G02F1/13;G05B15/00;G05B19/418;G05B24/02;H01L21/00;(IPC1-7):G06F19/00 主分类号 H01L21/02
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