METHOD OF CORRECTING LASER IRRADIATION POSITION IN LASER BEAM MACHINING

摘要

PROBLEM TO BE SOLVED: To easily and rapidly form information to correct the deviation between a position where a workpiece is to be irradiated with a laser beam and a position where the workpiece is actually machined. SOLUTION: The amount of the mispositioning of a small number of the test holes of the workpiece 5 are measured and the coefficients of the respective terms of a calculation equation expressing the characteristic distortions occurring in a galvanometer 3 and fθlens 4 capable of expressing the deviation over the entire area of the machining region by nonlinear regression analyses are calculated by the multiple regression analyses. In actually machining the workpiece, the position to be irradiated with the laser beam is corrected by using the calculation equation, by which the machining with high accuracy is made possible.