Gas cabinet assembly comprising back migration scrubber unit

摘要

A gas containment assembly including a containment enclosure defining an enclosed interior volume, with an exhaust inlet and an exhaust outlet for flow of exhaust gas into the enclosed interior volume through the exhaust inlet and flow from the containment enclosure through the exhaust outlet. A gas supply vessel and/or gas flow circuitry is provided in the interior volume of the containment enclosure. A back-migration scrubber unit overlies and is sealed to the exhaust inlet so that back-flow migration of gas from the gas supply vessel and/or gas flow circuitry in the interior volume of the containment enclosure is sorptively taken up by sorbent material in the scrubber unit and prevented from passing into an ambient environment in which said gas containment assembly is deployed. This arrangement permits significant reduction in the flow rate of exhaust gas through the gas containment enclosure without compromising the safety of the gas containment assembly.