| 摘要 |
PROBLEM TO BE SOLVED: To provide a method in which stable discharge plasma processing is performed by generating uniform discharge plasma under the pressure in the vicinity of the atmospheric pressure regardless of a gas atmosphere in processing. SOLUTION: A solid dielectric 6 having relative dielectric constant of >=10 (under the environment of 25 deg.C) is provided on at least one counter surface of a pair of electrodes 4 and 5 opposed to each other, a base material 7 is disposed between one electrode 4 and the solid dielectric 6 or between the solid dielectrics, and the surface of the base material 7 is processed by the discharge plasma generated by applying the pulsed electric field having 1-40 kV/cm electric field intensity between the pair of electrodes. |
