发明名称 |
Light transmissive substrate for an optical mems device |
摘要 |
An optical MEMS device and a package include an optical through path for allowing light to pass from a first side of the package, through a substrate on which the optical MEMS device is mounted and through a second side of the package opposite the first side. The package can include first and second light-transmissive portions or apertures for allowing the light to pass. The optical MEMS device can be a shutter for selectively affecting the flow of light through the package. A plurality of optical MEMS devices may be located within a single package because the optical paths for the MEMS devices can be substantially parallel to each other. |
申请公布号 |
AU2001297774(A1) |
申请公布日期 |
2002.10.28 |
申请号 |
AU20010297774 |
申请日期 |
2001.12.19 |
申请人 |
COVENTOR, INCORPORATED |
发明人 |
ARTHUR S. III MORRIS;DANA R. DEREUS;SHAWN J. CUNNINGHAM |
分类号 |
B81B3/00;B81B7/00;B81B7/04;B81C1/00;G02B6/34;G02B6/35;G02B26/08;(IPC1-7):G02B6/00 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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