METHOD AND DEVICE FOR MATCHING SUBSTRATES

摘要

PURPOSE: A method and device for matching substrates are provided to accurately and reliably match two substrate in a short time, even for a large substrate. CONSTITUTION: When two substrates(33,34) are matched together with mechanical pressurizing force in a vacuum chamber, pressurization mechanisms(16) which pressurize the vicinities of four corner parts of the square substrates are respectively provided, the gap between the substrates is observed after pressurizing the vicinities with the predetermined pressurizing force, and the vicinities are pressurized after adjusting the pressurizing force of each pressurization mechanism based on the observation.