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发明名称
摘要
申请公布号
JP3337867(B2)
申请公布日期
2002.10.28
申请号
JP19950122707
申请日期
1995.05.22
申请人
发明人
分类号
H01L21/304;(IPC1-7):H01L21/304
主分类号
H01L21/304
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