POWER SUPPLY APPARATUS FOR PREVENTING ERROR OPERATION OF EQUIPMENT ACCORDING TO INSTANTANEOUS POWER FAILURE AND SEMICONDUCTOR MANUFACTURING EQUIPMENT USING POWER SUPPLY APPARATUS

摘要

PURPOSE: A power supply apparatus for preventing an error operation of equipment according to instantaneous power failure and a semiconductor manufacturing equipment using the power supply apparatus are provided to improve the operation stability of the equipment by increasing hold-up time in the instantaneous power failure. CONSTITUTION: An emergency power breaking circuit(37) controls a power switch so that an AC(Alternating Current) power is continuously supplied to a load for a predetermined time in the instantaneous power failure. A first voltage rectifier(43) converts the AC power to charge a DC(Direct Current) voltage and discharges the DC voltage for a predetermined time when the AC power is cut-off by the instantaneous power failure. A second voltage rectifier(47) receives the DC voltage from the first voltage rectifier(43) by a primary terminal thereof, outputs a predetermined operating voltage to a secondary terminal and determines hold-up time by the charging voltage of the first voltage rectifier(43) and the charging voltage inputted through the primary terminal.