发明名称 INSPECTION METHOD OF APERTURE GRILLE
摘要 PROBLEM TO BE SOLVED: To provide an inspection method for steadily and efficiently determining the separation state of the piled tape part in the double-tape aperture grilles, that have the structure of piling the aperture grilles in double layers and are manufactured by electric plating method. SOLUTION: The intermediate metal layer of the laminated plated membrane, which is formed by clipping another metal layer between two layers of aperture grilles is removed by melting, and the light source is installed on one side of the double-tape aperture grille obtained. The tape part of the aperture grille on either one side is held by an adhesive tape or the like and is moved along the direction crossing at right angles the longitudinal direction of the tape part, and the interference stripes of the light that transmit the slit parts is observed. Thereby, the separation state of the piled tape part can be determined.
申请公布号 JP2002313233(A) 申请公布日期 2002.10.25
申请号 JP20010110782 申请日期 2001.04.10
申请人 SUMITOMO METAL MINING CO LTD 发明人 OGASAWARA SHUICHI
分类号 G01N21/84;C25D1/08;H01J9/14;H01J9/42;(IPC1-7):H01J9/42 主分类号 G01N21/84
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