| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a system for obtaining a desired resonance frequency of a bulk sound wave device within a specified permissible tolerance. SOLUTION: The method for turning the bulk sound wave device formed of a plurality of sound wave generation and control layers on a substrate includes a process of providing a mask with an aperture near to the surface of the device, a process of varying the thickness of the device by providing a particle beam onto the mask, making at least a part of the particle beam pass through the aperture, and bringing the device surface into contact with a contact area substantially segmented by the aperture, and a process of varying the contact area by rearranging the aperture of the mask laterally on the device surface. |
