发明名称 RESIST COATER
摘要 PROBLEM TO BE SOLVED: To reduce the footprint of a resist coater for coating a tape material having a conductive thin film formed on the surface of an insulating material with a resist. SOLUTION: The resist coater is provided with a tape shaped material feed means for feeding the rolled up tape shaped material, a cleaning means for cleaning the tape shaped material which has been fed from the tape shaped material feed means while conveying the tape shaped material in a first direction, a resist coating means for coating the surface of the tape shaped material which has been cleaned by the cleaning means with a liquid resist and reversing and sending the tape shaped material, a resist drying means for drying the resist while linearly conveying the tape shaped material coated with resist by the resist coating means in a second direction reverse to the first direction, and a tape shaped material rewinding means for rewinding the tape shaped material whose resist has been dried into a roll. In this case, the resist drying means is placed in a space above the cleaning means which is installed on a specified setting surface.
申请公布号 JP2002313848(A) 申请公布日期 2002.10.25
申请号 JP20010112189 申请日期 2001.04.11
申请人 HITACHI CABLE LTD 发明人 GOTO MASAYOSHI;ISHIKAWA HIROSHI
分类号 G03F7/16;B05C1/08;B05C9/10;B05C9/14;B05C13/00;B05D1/28;G03F7/38;H01L21/60;H05K3/06;H05K3/28 主分类号 G03F7/16
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