| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer cassette support member that reduces dust, and at the same time can accurately detect whether a wafer cassette has been placed at a desired position or not. SOLUTION: The wafer cassette support member 1 has a base plate 7. On the upper surface of the base plate 7, four guide sections 8 for positioning are provided to position the wafer cassette 2 at the desired position on the base plate 7. At two guide sections 8S for positioning that are placed on a diagonal line out of the four guide sections 8 for positioning, a slit 11 for allowing light to pass is formed. Near each of the guide sections 8S for positioning, an optical detection switch 12 is provided. The optical detection switch detects whether the wafer cassette 2 has been placed at the desired position on the base plate 7 or not, and comprises light emission and light reception sections 12A and 12B that are oppositely arranged while the slit 11 of the guide section 8S for positioning is put between the light emission and light reception sections 12A and 12B. |
