| 摘要 |
<p>PROBLEM TO BE SOLVED: To effectively form a plurality of surface conduction type electron emitting elements which are arranged in matrix-shape, so as to have uniform characteristics. SOLUTION: A matrix, to which the surface conduction type electron emitting elements of 6×6 are arranged, is divided into small matrices (1)-(9), to each of which electron emitting elements of 2×2 are arranged. Formation of each matrix is carried out by impressing a pulse at every 10μs for 1 second interval, and this process is repeated at every voltage increase of 0.1 V, until the pulse voltage reaches up to 10 V. Taking note of the matrix (1), the pulse with an interval of 1μs can be successively impressed to another eight small matrices during the pulse interval of 10μs, namely, the formation of the elements (1)-(9) can be carried out in parallel. Uniform forming of each element can be carried out, so far as the unit of simultaneous voltage impression is within a scale of 2×2.</p> |
