| 摘要 |
PROBLEM TO BE SOLVED: To improve working efficiency in an automatic guided vehicle for automatically carrying and transferring semiconductor wafers between stations in a semiconductor-manufacturing factory or the like. SOLUTION: A wafer 10 is accommodated in a buffer cassette 5 by a transfer apparatus 3, the artificial guided vehicle 1 is moved to a target station, and the wafer 10 in the buffer cassette 5 is taken out and is transferred to an attitude-matching apparatus 4 by the transfer apparatus 3. Then, the attitude and direction of the wafer 10 are matched by the attitude-matching apparatus 4, the ID information on the wafer 10 is read by an OCR43, and the wafer 1 whose ID information has been read is retained by a transfer hand 31. At that time, another wafer 10 that is placed at the station is removed by the other transfer hand 31, the wafer 10 whose ID information has been read is transferred to the station in a specific posture and direction, and at the same time the ID information is transmitted to the station by control. |
