| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a manufacturing equipment used for the manufacturing of an image forming device, equipped with an electron source, having electron emitting elements with excellent and stable electron emitting property. SOLUTION: The manufacturing equipment is used for the manufacture of an imaging device comprising an envelope, an electron source having a plurality of electron emitting elements housed in the envelope, and an image forming member forming an image by the radiation of electrons emitted from the electron source. The electron emitting element comprises a conductive film, having an electron-emitting part and an electron impressing a voltage on the conductive film. The process of forming the electron-emitting part includes a process of coating an organic material film on the conductive film, a process of carbonizing the organic material film, and a process of forming cracks on the conductive film. The manufacturing equipment comprises a chamber, in which the process of carbonizing the organic material film is processed, and a chamber in which the process of forming cracks on the conductive film is processed.</p> |
