发明名称 ELEVATING AND LOWERING DEVICE FOR WORK
摘要 <p>PROBLEM TO BE SOLVED: To provide an elevating/lowering device of a work which can prevent the damage of the work when the work which is easily damaged is lifted from a suction plate by an elevating/lowering pin. SOLUTION: In the work elevating/lowering device, the work is elevated and lowered with respect to the plate 1 which sucks and holds the thin work 3 and in which a prescribed processing is performed on the work. The device is provided with the elevating/lowering pin 2 for elevating and lowering the work and a cylinder 5 for elevating/lowering and driving the elevating/lowering pin. The force of the elevating/lowering pin to push up the work is set to be not more than 10 times as much as the weight of the work.</p>
申请公布号 JP2002313893(A) 申请公布日期 2002.10.25
申请号 JP20010110248 申请日期 2001.04.09
申请人 CANON INC 发明人 KASAI SHOZO
分类号 B65G49/06;H01L21/68;H01L21/683;(IPC1-7):H01L21/68 主分类号 B65G49/06
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