| 摘要 |
PROBLEM TO BE SOLVED: To improve the reliability in a wafer transfer means that is mounted on an automatic guided vehicle that automatically carries and transfers semiconductor wafers between stations at a semiconductor-manufacturing factory or the like. SOLUTION: An attitude-matching apparatus 4 for aligning the attitude and direction of a wafer 10, a transfer apparatus 3 for transferring the wafer 10, and an OCR 43 for reading the ID information of the wafer 10 are mounted to the automatic guided vehicle 1. Then, vacuum chuck holes 34 and 34 are provided at a transfer hand 31 of the transfer apparatus 3 for sucking by an air pump 64, thus sucking and retaining the wafer 10 using the transfer hand 31. Then, an ID mark 11 where ID information on the manufacturing history or the like of the wafer 10 is coded is put onto the board surface of the wafer 10. |
