| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a positioning device for reducing suction force (or repulsion) which an instruction shat inserted into a process chamber receives. SOLUTION: The positioning device for positioning a work in the process chamber from the outside the process chamber in a state where the air tight of the process chamber is kept is provided with a casing 20 having a pair of confronted openings 22a and 22b, and a process chamber P communicated with the outside through a pair of the openings 22a and 22b, and with a shaft member 30 which can move at one degree of freedom, and which passes through a pair of the openings 22a and 22b while the process chamber P is sealed.</p> |
