METHOD OF FORMING METAL GATE

摘要

PROBLEM TO BE SOLVED: To provide a method of forming a metal gate capable of preventing a whisker of a metal oxide film from being formed in a process of forming a metal gate. SOLUTION: In the method of forming a metal gate electrode after a selective oxidation process, heat treatment is performed in a gas atmosphere containing hydrogen atoms. The heat treatment process removes a metal oxide produced by the selective oxidation process by a reducing a reaction or prevents the formation of whisker nuclei by making the metal oxide contain hydrogen atoms to suppress surface mobility.