| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method of manufacturing a closed magnetic circuit thin film magnetic core which is easily manufactured, and to provide a method of manufacturing a microinductor and a microtransformer, which are low in a leakage magnetic flux without any effect over other element and a circuit wiring and are high also in a Q value. SOLUTION: A lift-off method is used, soft magnetic thin films 1a are formed by a patternization process, a magnetic field neutral film forming process and an unnecessary part removal process and moreover, by repeating these processes once more, soft magnetic thin films 1b are formed, and a closed magnetic circuit thin film magnetic core 1 consisting of the soft magnetic thin films having an uniaxial anisotropy is formed.</p> |
