| 发明名称 |
DEBRIS ELIMINATOR, LIGHT SOURCE AND EXPOSURE DEVICE |
| 摘要 |
PROBLEM TO BE SOLVED: To eliminate difficulty in reducing debris. SOLUTION: A debris eliminator has at least one blade and a moving mechanism for cleaning up a debris-containing space by moving the blade. |
| 申请公布号 |
JP2002313598(A) |
申请公布日期 |
2002.10.25 |
| 申请号 |
JP20020003939 |
申请日期 |
2002.01.10 |
| 申请人 |
NIKON CORP |
发明人 |
MICHAEL SOGAADO |
| 分类号 |
G21K5/02;G03F7/20;H01L21/027;H05G2/00;(IPC1-7):H05G2/00 |
主分类号 |
G21K5/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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