| 摘要 |
PROBLEM TO BE SOLVED: To provide a high pressure processor capable of efficiently supplying a liquid chemical at a required timing and effectively reducing costs in the high pressure processor installable inside a clean room. SOLUTION: The high pressure processor is a device for performing removal processing of unrequired materials on an object to be processed by bringing a high pressure fluid and the liquid chemical other than the high pressure fluid into contact with the object under a pressure, and is provided with a plurality of high pressure processing chambers, a common high pressure fluid supply means for supplying the high pressure fluid to the high pressure processing chambers, a separation means for separating gaseous components from the mixture of the high pressure fluid and the liquid chemical discharged from the high pressure processing chambers after processing and a common take-out/ take-in means for taking the object in and out of the respective high pressure processing chambers. A liquid chemical supply means for supplying the liquid chemical to the high pressure processing chamber is provided for each high pressure processing chamber. |
