DEVICE AND METHOD FOR TRANSPORTING SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To speedily position a substrate on a substrate holding hand with simple and inexpensive constitution. SOLUTION: An indexer robot IR has a pair of hands 11 and 12. A main transport robot CR also has a pair of hands 21 and 22. A wafer W is directly transferred from the hand 21 to the hand 11. Prior to the transfer of the wafer W, the hands 21 and 12 move to positioning pins 71 and 72 from a transfer position WT. Thus, the wafer W on the hands 21 and 12 horizontally and relatively move and is led to prescribed positions on the hands 21 and 12. Then, the hands 11 and 22 scoop the wafer W.