发明名称 LAYERED STACKS AND METHODS OF PRODUCTION THEREOF
摘要 Low dielectric constant layered materials and a methof for making said layered materials comprising the steps of: a) providing a surface ; b) spinning a dielectric material on to the surface; c) curing the dielectric material to form a dielectric layer; d) spinning a low dielectric constant material on to the dielectric layer; and e) curing the low dielectric constant material to form a low dielectric constant layer. Each layer can be spun-on to the layered component and subsequently cured before additional layers are added or all layers can be spun-on to the layered component and then the entire stack is cured at once.
申请公布号 CA2442030(A1) 申请公布日期 2002.10.24
申请号 CA20022442030 申请日期 2002.04.16
申请人 HONEYWELL INTERNATIONAL INC. 发明人 LI, BO;IWAMOTO, NANCY;NAMAN, ANANTH;THOMAS, MICHAEL;DANIELS, BRIAN;KOROLEV, BORIS;APEN, PAUL
分类号 B05D1/40;B05D7/00;H01L21/312;H01L21/316;H01L21/768;H05K1/03;(IPC1-7):H01L21/31;B32B9/04;H01L21/314 主分类号 B05D1/40
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