Low dielectric constant layered materials and a methof for making said layered materials comprising the steps of: a) providing a surface ; b) spinning a dielectric material on to the surface; c) curing the dielectric material to form a dielectric layer; d) spinning a low dielectric constant material on to the dielectric layer; and e) curing the low dielectric constant material to form a low dielectric constant layer. Each layer can be spun-on to the layered component and subsequently cured before additional layers are added or all layers can be spun-on to the layered component and then the entire stack is cured at once.
申请公布号
CA2442030(A1)
申请公布日期
2002.10.24
申请号
CA20022442030
申请日期
2002.04.16
申请人
HONEYWELL INTERNATIONAL INC.
发明人
LI, BO;IWAMOTO, NANCY;NAMAN, ANANTH;THOMAS, MICHAEL;DANIELS, BRIAN;KOROLEV, BORIS;APEN, PAUL