MULTI-SLIT ACTUATOR, INK JET HEAD, AND METHOD OF MANUFACTURING MULTI-SLIT ACTUATOR

摘要

A method of manufacturing a multi-slit actuator capable of eliminating washing to drying processes and forming even those slits other than linear ones or those slits of 50 mu m or less in width, comprising the steps of preparing specified sheets of piezoelectric material green sheets (1), opening a slit hole in the first piezoelectric material green sheet (1a) by a punch (8) having a stripper (10) disposed therearound and a die (9), raising the piezoelectric material green sheet (1a) by the stripper (10) without withdrawing the punch (8) from the piezoelectric material green sheet (1a), opening a slit hole in the second piezoelectric material green sheet (1b) by the punch (8), raising, in the same manner, two sheets of piezoelectric material green sheets (1a, 1b) punched by the stripper (10) without withdrawing the punch (8) from the piezoelectric material green sheet (1b) to laminate the piezoelectric green sheet simultaneously when the punching is performed and, after repeating these operations for specified sheets, stacking the green sheets on a substrate and baking the green sheets and substances to form integrally with each other.