CLUSTER TOOL AND METHOD FOR CONTROLLING TRANSPORT

摘要

A time (PSL) of a next wafer (W) to get ready to be transported into load lock chambers (LL1, LL2) at the time (Tp) when a wafer (W) is transported into either load lock chamber (LL1) or (LL2) is calculated on the basis of the timing of exchanging wafers (W) between the load lock chambers (LL1, LL2) and a loader module (LM). When this time (PSL) is calculated, loader arms (LA1, LA2) selects from load ports (LP1-LP3) a next wafer (W) with the shortest time of getting ready to be transported into the load lock chambers (LL1, LL2). This action improves transport delay with a cluster tool provided with the load lock chambers.