Device for attaching a semiconductor chip to a chip carrier

摘要

In a device for attaching a semiconductor chip (10) to a chip carrier (12), thereby producing an electrically conducting connection between contact areas (22, 24) arranged on a surface of the semiconductor chip (10) and contact areas (26, 28) on the chip carrier (12) by means of an anisotropically conducting film (16) or an anisotropically conducting paste (16), a pressure die (18) is used for the application of the pressure to the chip (10) with an adjustable pressing force against the chip carrier (12). A counter-pressure support (14) accepts the chip carrier (12) with the semiconductor chip (10) arranged on it with the interposition of the anisotropically conducting film (16) or the anisotropically conducting paste (16). An elastic body (20) is arranged either between the pressure die (14) and the semiconductor chip (10) or between the chip carrier (12) and the counter-pressure support (14).