发明名称 |
Disk-shaped silicon sensor element for a pressure sensor and pressure sensor using such a silicon sensor element |
摘要 |
A disk-shaped silicon sensor element for a pressure sensor is described. The sensor element has a disk upper side, a disk underside, stress measuring elements that convert mechanical stresses into signals, and circuits disposed on the disk upper side. The disk underside serves during a pressure measurement for receiving a force that acts as a bending pressure for bending the disk-shaped silicon sensor element. The sensor element is formed with essentially the same thickness over its entire extent.
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申请公布号 |
US2002152817(A1) |
申请公布日期 |
2002.10.24 |
申请号 |
US20020131367 |
申请日期 |
2002.04.24 |
申请人 |
LANDGRAF HANS-PETER;OFFEREINS HENDERIKUS-L. |
发明人 |
LANDGRAF HANS-PETER;OFFEREINS HENDERIKUS-L. |
分类号 |
G01L9/00;(IPC1-7):G01L9/00 |
主分类号 |
G01L9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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