发明名称 KEEPERS FOR MRAM ELECTRODES
摘要 A magnetic memory device, such as a magnetic random access memory (MRAM), and a method for forming same are described herein. The magnetic memory device includes a bit (24), such as a tunneling magneto-resistance (TMR) structure or a giant magneto-resistance (GMR) structure, which is sensitive to magnetic fields and stores data. The bit (24) is preferably disposed between a top electrode (74) with a magnetic keeper (52, 54) and a lower conducting line (12). The top electrode (74) is formed by a damascene process and is preferably formed from copper. The magnetic keeper (52, 54) of the top electrode (74) includes a magnetic material layer (54) (e.g., Co-Fe) and can also include a barrier layer (52) (e.g., Ta). In addition, the magnetic keeper stack (52, 54) can be in contact with one, two, or three surfaces of the top electrode (74) that face away from the bit (24).
申请公布号 WO02084755(A2) 申请公布日期 2002.10.24
申请号 WO2002US04771 申请日期 2002.02.14
申请人 MICRON TECHNOLOGY, INC. 发明人 TUTTLE, MARK, E.
分类号 H01L27/105;H01L21/8246;H01L27/22;H01L43/08 主分类号 H01L27/105
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