发明名称 LAYERED STACKS AND METHODS OF PRODUCTION THEREOF
摘要 <p>Low dielectric constant layered materials and a methof for making said layered materials comprising the steps of: a) providing a surface ; b) spinning a dielectric material on to the surface; c) curing the dielectric material to form a dielectric layer; d) spinning a low dielectric constant material on to the dielectric layer; and e) curing the low dielectric constant material to form a low dielectric constant layer. Each layer can be spun-on to the layered component and subsequently cured before additional layers are added or all layers can be spun-on to the layered component and then the entire stack is cured at once.</p>
申请公布号 WO2002083327(A1) 申请公布日期 2002.10.24
申请号 US2002011927 申请日期 2002.04.16
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